Physical properties of ITO thin films prepared by ion-assisted electron beam evaporation

摘要

Tin doped indium oxide (ITO) thin films were prepared on IR glass substrates at different oxygen flow rate by ion-assisted electron beam evaporation method. Properties such as microstructure, morphology, sheet resistance and optical transmittance were investigated by X-ray diffractometer, SEM, four-point probe and UV-VIS-IR spectrophotometer, respectively. Lattice constant, inner stress level and energy band gap (Eg) of ITO thin films as-deposited were calculated and discussed. The mechanical properties of ITO thin films were studied by scratching method. The measurements were performed by scratch tester and the results were recorded as acoustic emission spectra and scratch track images taken by SEM. Relationship between inner stress level and mechanical performance was investigated in detail.