Vacuum evaporator using electron beams as heat source - producing thin film alloys and compounds with high rate of evaporation

摘要

Vacuum vaporisation appts. for producing thin films with the use of electrons comprises a discontinuous stream of electrons, controlled by means in the vacuum vessel consisting of incandescent filament grid and terminal plate which can be cooled. Control of the electron stream may be separate from the processing vessel, using transistors and/or electron tubes. The drawing also shows the electron source and the material to be vaporised.