Analysis on the Error Caused by Working Frequency Drift for the Silicon Micromechanical Gyroscope

摘要

The Silicon Micromechanical Gyroscope (SMG) has broad application in various fields, but its development is badly restricted by the error caused by temperature drift. The temperature drift will lead to the change of working frequency, and it is one of the main factors which caused the drift error. Presently, fewer researchers focus on how the working frequency affects the scale factor and bias of the gyroscope. In this paper, the effects of the working frequency drift on the scale factor and bias of the gyroscope will be analyzed in theory and simulation, in terms of the dynamics equations and the process of signal detection of SMG. The results show that, the working frequency drift has a significant impact on the performance of the gyroscope, and typically, considering 1 Hz working frequency drift, the relative variation of scale factor is up to the order of 10,000 ppm, and the variation of bias is up to the order of 10~2(°/h). The conclusions of this paper provide a basis for the further research on the temperature error models and compensations for SMG.