computational complexity; factory automation; materials handling equipment; ontologies (artificial intelligence); planning; production engineering computing; semiconductor device manufacture; automated material handling system; automated planning; automation concepts; domain specific ontology; high mix semiconductor factories; logic semiconductors; material flow simulation; power semiconductors; product changes; ramp up phases; semiconductor manufacturing AMHS; silicon wafers; simulation experiments; system experts knowledge; systems complexity; Adaptation models; Analytical models; Knowledge based systems; Manufacturing; Ontologies; Production; Semiconductor device modeling;
机译:具有特定领域本体的半导体制造AMHS的仿真实验的自动规划和创建
机译:半导体AMHS的模拟实验的自动规划,执行和评估
机译:使用特定领域的仿真系统自动进行道路建设计划
机译:用半导体制造AMHS的域特异性本体进行自动规划和创建模拟实验
机译:仿真建模级别可支持半导体晶圆厂的集成能力和AMHS决策。
机译:介电常数对贵金属/半导体SERS增强的影响:Ag / Ge和Ag / Si衬底的FDTD模拟和实验验证
机译:半导体amHs仿真实验的自动规划,执行和评估
机译:分布式数据库的自动代理本体创建