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Automated design and execution of experiments with integrated model creation for semiconductor manufacturing tools
Automated design and execution of experiments with integrated model creation for semiconductor manufacturing tools
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机译:带有集成模型创建功能的半导体设计工具的自动化设计和实验执行
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摘要
A method, system and medium of automation performed on a semiconductor manufacturing tool. The method creates a designed set of experiments for the tool and runs the created set of experiments. The method also collects data resulting from running the experiments and creates a model based on the collected data. The created model is used in automatically controlling the tool.
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