Synthesization of nickel nanoparticles embedded in SU8 polymer for electromagnetic actuator membrane

摘要

A study of synthesization and magnetic properties of cured polymer composite on nickel (Ni) as an actuator membrane is prepared in this work. SU8 3050 polymer is used to mix with magnetic nanoparticles Ni to produce a hybrid material. The mixing process are done by using mechanical stirrer, ultrasonication and manually hand stirring. In this work an easy sol-gel method is selected to embed magnetic particles into the polymer matrix. Characterization of particle distribution is observed by metallurgical microscopy and scanning electron microscope (SEM). It is observed that the spreading of Ni particles inside the polymer chain are constant without clustering effects. Magnetization curves of each sample are traced at room temperature using vibration sample magnetometer (VSM). A good compromising magnetic properties with patternable high aspect ratio structures have been successfully fabricated using a standard MEMS process.