Picosecond laser system 193 nm based on solid state Nd:YAG laser, parametric oscillator and ArF amplifier

摘要

Realized method of producing high-power picosecond UV pulses at a wavelength of 193 nm. Nd: YAG laser is used, followed by radiation and nonlinear transformations in the excimer gain medium to an energy of 10 mJ, a wavelength of 193 nm..