Love Waves in a Quartz-based Phononic Structure

摘要

This paper presents result of Love wave propagation in a quartz substrate coated with a phononic thin film. In such a phononic structure, large acoustic band gaps with strong reflection for the Love waves are existed. The frequency range and Love wave attenuation in the band gap were predicted by the acoustic band structure utilizing the complex wavenumbers. MEMS experiments were conducted to verify the band gap in the GHz range and the results are in good accordance with the numerical predictions.