Preparation and Application of PZT Films in Microelectronics

摘要

The paper describes conceptual framework for understanding the behavior of piezoelectric materials by emphasizing important relationships between internal structure and properties of thin films. It attempts to present a general picture of the piezoelectric material nature and the mechanisms that act upon, modify, and control their properties. The development of PZT materials in the form of films on the conception of multiphase structure has been carried out in this paper. Metal alkoxide solutions and PZT powder suspensions were used for thin films preparation by electrophoretic deposition (EPD) technique. Specific features of the EPD method were considered. Microstructure of the films was examined as well as their physical properties.