首页> 外文会议>ASME international mechanical engineering congress and exposition >REDUCED ORDER MODEL OF TWO COUPLED MEMS PARALLEL CANTILEVER RESONATORS UNDER DC AND AC VOLTAGE NEAR NATURAL FREQUENCY
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REDUCED ORDER MODEL OF TWO COUPLED MEMS PARALLEL CANTILEVER RESONATORS UNDER DC AND AC VOLTAGE NEAR NATURAL FREQUENCY

机译:直流和交流电压附近自然频率下两个耦合MEMS并联悬臂谐振器的降阶模型

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This paper deals with a system of two coupled parallel identical MEMS cantilever resonators and a ground plate. Alternating Current (AC) and Direct Current (DC) voltages are applied between the first resonator and ground plate, and a DC voltage applied between the resonators. The AC voltage frequency is near natural frequency of the resonators. The electrostatic forces produced by voltages are nonlinear. System equations of motion are obtained using Lagrange equations, then nondimensionalized. The Method of Multiple Scales (MMS) is used to find the steady state frequency response. The Reduced Order Model (ROM) is used to validate MMS results. Matlab is used to find cantilever frequency response of the resonator tip. The DC voltage between resonators is showed to significantly influence the response of the first resonator.
机译:本文研究了一个由两个耦合的并联相同的MEMS悬臂谐振器和一个接地板组成的系统。在第一谐振器和接地板之间施加交流(AC)和直流(DC)电压,并且在谐振器之间施加直流电压。交流电压频率接近谐振器的固有频率。电压产生的静电力是非线性的。使用拉格朗日方程获得运动系统方程,然后对其进行无量纲化。使用多尺度方法(MMS)来找到稳态频率响应。降阶模型(ROM)用于验证MMS结果。 Matlab用于查找谐振器尖端的悬臂频率响应。已显示谐振器之间的DC电压会显着影响第一谐振器的响应。

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