Dynamic Characteristic Analysis of Laminar Flow Meter

摘要

Recently, the unsteady flow rate measurement is very important. In this paper, we have been confirmed the static and dynamic characteristics of laminar flow meter by experiments. Especially, we try to measure the oscillatory flow of the high frequency up to 100[Hz]. As a result, we have been confirmed the good performance that this flow meter can be measured oscillatory flow up to 100[Hz]. So we think that it is applicable to the various control system using this flow meter.