70 nm Lensless Diffractive Microscopy using Tabletop Soft X-ray Sources

摘要

We use curvature correction and high-numerical-aperture imaging to demonstrate a soft-X-ray diffraction microscope with 70-90 nm resolution using two tabletop coherent sources. This near-diffraction-limited resolution of 1.5λ is a first for X-ray diffractive imaging.