Refractive index physical thickness distributions measurement and consideration of dependence of measurement accuracy on scanning interval using low-coherence digital holography

摘要

The measurement method of a refractive index distribution and a physical thickness distribution using digital holography with a low-coherent light source is proposed. The introduction of a datum plane enables the simultaneous measurement of a refractive index and a physical thickness distributions. By the optical experiments, the potential of the proposed method is confirmed. For the reduction of measurement time, the relation between stepping intervals of a reference mirror and measurement results are also discussed.