Reproducibility and free spectral range (FSR) control of a high quality factor ??? 1D photonic crystal (PhC) extended cavity

摘要

In this paper we report successful experimental demonstration of consistency in controlling the resonance quality factor (Q-factor) value in the range from 1000 to 80,000, together with good free spectral range (FSR) control in the range from 30 nm to 62 nm - for an extended cavity. We have also demonstrated good repeatability of high Q-factor values for 1D photonic crystal (PhC)/Photonic wire (PhW) extended cavities based on Silicon-on-Insulator (SOI) using different fabrication cycles. The cavities that are considered in this paper range from 2 μm to 8.25 μm in length. The Q-factors for each resonance obtained for particular extended cavities have been measured on different occasions, with 5% variation in the Q-value over an extended period of time.