Nanoindentation hardness tests were conducted on various AlxGa1−xN alloys grown by metal-organic vapor-phase epitaxy. AlGaN alloys showed the hardness of 16.5–19.5 GPa strongly dependent on the alloy composition with a maximum at x∼0.5, while the Young's modulus was ∼ 300GPa, almost constant in the whole composition range investigated. The observed alloy hardening was confirmed under considering the effects of residual in-plane strain and threading dislocation densities.
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机译：对通过金属有机气相外延生长的各种Al x Ga 1-x N合金进行了纳米压痕硬度测试。 AlGaN合金的硬度为16.5-19.5 GPa，在很大程度上取决于合金的组成，最大硬度在x〜0.5，而杨氏模量为〜300GPa，在所研究的整个组成范围内几乎恒定。考虑到残余面内应变和螺纹位错密度的影响，确认了观察到的合金硬化。
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