Systematic maintenance and applications of Failure Modes and Effects Analysis (FMEA) in semiconductor manufacturing

摘要

Failure Modes and Effects Analysis (FMEA) is considered as a systematic, learning retention vehicle in semiconductor manufacturing. This paper tries to set up a quantized evaluation approach on FMEA effectiveness for the first time and also presents a systematic maintenance method of FMEA in Foundry (FAB) to instead of traditional paper works which realizes intelligent maintenance to increase the timeliness and accuracy of FMEA. And, cross system applications between e-FMEA system and other FAB manufacture and monitor systems are presented to show the effectiveness improve after systematization.