Advance manufacturing process of LCOS based on Copper Reflector

摘要

LCOS (Liquid Crystal on Silicon) is a new reflective display technology combining LCD and CMOS integrated circuit. The display device using LCOS has many advantages such as large screen, high brightness, high resolution and energy saving. Compared with the traditional IC chip, LCOS process in the later stage has added special polishing and top layer metal mirroring technology. In this paper, a new LCOS design scheme is proposed, which uses copper as the reflection layer, saving the steps of aluminum polishing. It not only reducing the process risk, but also saving the aluminum polishing equipment. The electrical parameters and defect of the chip were controlled within the acceptable range experimentally.