Comparison of Roll-to-Roll Deposited ITO on Flexible Glass, PEN and PET

摘要

The Center for Advanced Microelectronics Manufacturing has developed aprocess for high quality ITO deposition at elevated temperatures using a GVE Optilabsystem. ITO thin films have been deposited on Corning? Willow? Glass, PEN andPET. This paper will discuss the relationship between the ITO thin film properties andthe substrate type. A comparison of our tools best possible ITO properties and theconditions necessary for those properties per substrate type will be examined.