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Design and TracePro simulation of variable contrast target in MRC measurement

机译:MRC测量中可变对比度目标的设计和TracePro仿真

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MRC measurement in target of different contrast can't accurately describe the principle of light path. This device is huge and difficult to do exploratory research. According to the basic principles of obtaining different contrast targets, a new method of getting target is designed. The method of obtaining different contrast is simulated by TracePro in Windows, and the simulation results are analyzed. The structure of system is studied. The relationship between the various modules is analyzed. The simulation shows that the device of obtaining different contrast target is feasibility. By comparing with the results of practical measurement, the method is effectiveness. We can achieve the purpose of the device improving in TracePro.
机译:不同对比度目标的MRC测量不能准确地描述光路原理。该装置庞大且难以进行探索性研究。根据获得不同对比度目标的基本原理,设计了一种新的目标获取方法。 Windows中的TracePro对获得不同对比度的方法进行了仿真,并对仿真结果进行了分析。研究了系统的结构。分析了各个模块之间的关系。仿真表明,获得不同对比度目标的装置是可行的。通过与实际测量结果的比较,该方法是有效的。我们可以在TracePro中达到改善设备的目的。

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