Maneuvering Pull-in Voltage of an Electrostatic Micro-switch by Introducing a Pre-charged Electrode

摘要

A new method to greatly reduce and control the pull-in voltage of an electrostatic micro-switch was developed, simply by introducing a pre-charged floating electrode. For showing feasibility, the conventional electrostatic micro-switch is used with substrate biasing. Using this method, the original pull-in voltage of 48V was reduced to 3V and symmetrical hysteric curve around 0V was obtained like an ideal non-volatile memory.