RF magnetron sputtered molybdenum back contact for Cu2ZnSnS4 thin film solar cells

摘要

Molybdenum thin films were RF sputtered on soda lime glasses as back contacts for Cu2ZnSnS4 solar cells. In this work, the pressure and substrate temperature effect on structural, electrical, adhesion and surface morphology are investigated. About 500 nm thick thin films deposited at low argon pressure and high substrate temperature exhibit low resistivity of 11.4 µΩ cm. Films deposited at high argon pressure and low substrate temperature show high resistivity and good adhesion to glass substrates. Films deposited at low argon pressure and high substrate temperature exhibit low resistivity but suffer from poor adhesion. Smooth surface and low resistivity were obtained at low argon pressure.