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Biomimetic Nanostructure Fabrication to Increase Light Transmission Efficiency in Optoelectronic Devices

机译:仿真料纳米结构制造,以提高光电器件中的透光效率

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We report on enhancing the coupling between an light emitting diode and photodiode pair by fabricating biomimetic sub-wavelength nanostructures on both of the optoelectronic devices. This modification helps to increase the light transmission of each device, which enhances the coupling between the device pairs. The process involves the formation of a self-assembled colloidal crystal of polystyrene nanospheres deposited on a silicon substrate to serve as a mask in reactiveion-etching. The resulting etched nanopattern is transferred from the silicon with polydimethylsiloxane (PDMS) nanoimprint lithography to the surface of an optoelectronic device. The PDMS functions as a mold that imprints the nanostructure pattern on optical adhesive placed on the surface of the device. We demonstrate an increase in photodiode output in optical device pairs consisting of inorganic light emitting diodes and photodiodes with the presence of the biomimetic nanostructures on their surface. The presented results are promising for sensing system applications using pairs of light emitters and detectors.
机译:我们通过制造在两个光电器件上制造仿生子波长纳米结构来提高发光二极管和光电二极管对的耦合。该修改有助于增加每个设备的光传输,这增强了器件对之间的耦合。该方法涉及形成沉积在硅底物上的聚苯乙烯纳米球的自组装胶体晶体,以用作反应蚀刻的掩模。将得到的蚀刻纳米图用硅与聚二甲基硅氧烷(PDMS)纳米压印光刻转移到光电子器件的表面上。 PDMS用作模具,其在放置在装置表面上的光学粘合剂上压印纳米结构图案。我们展示了由无机发光二极管和光电二极管组成的光电二极管输出的增加,其表面上存在仿生纳米结构。所提出的结果是使用配对的光发射器和探测器来传感系统应用。

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