Building Blocks of a New ALD E-Nose - A First Step: N-Type and P-Type ALD Sensors

摘要

We constructed the basic building blocks of a new type of low-power sensor array with an n-type SnO_2 sensor and p-type CuO sensor. Both sensors have sensing film deposited by atomic layer deposition with thickness of 6.5 nm for SnO_2 and 20 nm for CuO, which are in an order thickness of their respective Debye lengths. Unique response values for ozone and acetone were seen with SnO_2 and CuO in the tested concentration ranges while CuO was seen to be more selective to humidity than SnO_2. The impact, reason for choosing these building blocks and the mathematical rationale behind choosing relevant data features are discussed.