NEW COATING SYSTEM FOR DIRECT-DEPOSITION OF SENSORS ON COMPONENTS OF ARBITRARY SIZE: A NOVEL APPROACH ALLOWING FOR THINNER SENSORS WITH HIGHER MEASURING ACCURACY

摘要

A new coating system for the deposition of sensors and thin-layers directly onto components of arbitrary size has been invented at the Institute of Micro Production Technology. This system allows for thinner sensors without any carrier substrate and with a higher measuring accuracy. Within this paper, the basic setup and the functional principle of the new coating system is presented. The deposition process sequence is described and the system is characterized concerning layer homogeneity and evacuation time.