Functionalization of self-organized networked SiO_xH_yC_z nano-islands deposited by atmospheric pressure microwave plasma torch on Pt/Si(100) substrates patterned by nano-indentation

摘要

A coaxial injection microwave excited plasma torch operating at atmospheric pressure is applied to synthesizing SiO_xH_yC_z nano-islands from hexamethyldisiloxane precursor on prepatterned Pt/Si(100) substrates. Herein we report on the spatial organization of these nano-islands in a square array of indents. Prior to the PECVD deposition, the Pt/Si(100) substrates are patterned by nano-indentation. SEM characterizations demonstrate that nano-indents act as trapping sites, allowing ripening of SiO_xH_yC_z nano-dots at those locations during subsequent deposition and diffusion of chemical species on the surface. Results show that islands ordering is intrinsically linked to the nucleation and growth at indented sites and strongly depends on pattern parameters. Then, we report on the selective alkyno-functionalization of the nano-islands surface, followed by the addition of coumarin fluorophore through click-chemistry process for a sensing purpose.