Key Technologies Related to High Vacuum Dry Pump

摘要

High vacuum dry pump is a typical technology-intensive mechatronics product. It is mainly composed of a specially designed gas-pumping structure and a set of very complicated electronic control system. Taking place the conventional dry pump unit, this pump can used in many hi-tech area such as semiconductor industry where oil-free high vacuum is needed. This paper introduces two types of dry pump, including their structures and performances. Some key points related to the development of the pump are intensely discussed as well.