Study on the Effect of ZnO Buffer Layer Thickness on the Properties of MgZnO Film

摘要

MgZnO thin films with different thickness ZnO buffer layer were grown on c-sapphire substrates by metal-organic chemical vapor deposition (MOCVD). The crystal qualities, surface morphologies and optical properties of MgZnO films were investigated by X-ray diffraction (XRD), atomic force microscope (AFM) and photoluminescence (PL) spectrum. The results showed that the thickness of ZnO buffer layer has important effect on the quality of MgZnO thin films. The MgZnO thin film with 20nm-thickness ZnO buffer layer showed the excellent crystal-quality, optical properties.