Design of the Hardware Circuit of the Grating Sensor Signal Subdivision

摘要

Because of manufacturing process factors,the direct use of measured raster Moire fringe is difficult to meet the requirements of high precision measurements a subdivision of Moire fringe is an important means of improving resolution. In this thesis,a hard circuit ia designed which can subdivide the grating signal.The circuit is divided into two main parts:the Coarse subdivision and direction judgment part and Elaborate subdivision part.The two parts working in a parallel circuit structur and can realize 256 frequency subdibision and the resolution of the system can reach 0.01um.Finally,on the basis of the measurement of laboratory results,the error of circuit trial platform is determined and the potential reasons which lead to the error are found out.