The CoFe2O4/Pb(Mg1/3Nb2/3)O3-PbTiO3 (CFO/PMNT) multilayer thin films have been prepared on LaNiO3/SiO2/Si(100) substrate using radio frequency magnetron sputtering method. The smooth, dense and crack-free surface of CFO/PMNT multilayer thin film shows the excellent crystal quality with root-mean-square (RMS) roughness only 2.9nm. The influence of the interface effect, film thickness, period number n and crystallite orientation of CFO/PMNT multilayer thin films on their ferroelectric and ferromagnetic properties were investigated. The related mechanism was also discussed.
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