Novel Low Temperature Fabrication Method for Label-Free Electronic Sensing of Biomolecules in Nanofluidic Channels with Integrated Electrodes

摘要

We present a low temperature surface-micromachined fabrication process for creating centimeter long nanochannels with integrated electrodes. The maximum temperature of the entire process is kept below 300°C to allow for the integration of addressable electrodes for a variety of bioanalytical applications. The diffusion limit on the release etch length is overcome by releasing the channel structure along its length, decreasing the etch length from O(cm) to O(um). In this work, we detail the fabrication steps and processes as well as discuss initial characterization and results.