首页> 外文会议>ASME InterPack conference;IPACK2009 >MANIPULATION OF THIN METALLIC WIRES BY JOULE HEAT JOINING
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MANIPULATION OF THIN METALLIC WIRES BY JOULE HEAT JOINING

机译:通过焦耳热联接操纵薄金属线

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Various kinds of metallic thin wires are expected to be key elements in future NEMS or MEMS due to their excellent physical properties and geometrical merits. However, it is not so easy task to manipulate thin wires for many kinds of application nowadays. We report manipulation techniques based on weld-joining on a substrate by Joule heating. The Pt thin wires with the diameter of about 625 nm were welded onto In wires as substrates. The Pt wires on the In substrate were taken for the three-point bending test and potential drop test for determining their mechanical and electrical properties. Moreover, based on the manipulation technique, by twisting the Pt thin wire around a core wire, simply-supported micro-coils on electrode chips were successfully fabricated, and their utility as electromagnetic actuators was realized.
机译:各种金属细线由于其优异的物理性能和几何优点,有望成为未来的NEMS或MEMS的关键元素。但是,如今对于许多应用而言,操纵细线并不是一件容易的事。我们报告了基于焦耳加热在基板上进行焊接的操纵技术。将直径约625nm的Pt细线焊接到作为衬底的In线上。将In基板上的Pt线用于三点弯曲测试和电势下降测试,以确定其机械和电气性能。此外,基于操纵技术,通过将Pt细线绕芯线缠绕,成功地制造了电极芯片上简单支撑的微线圈,并实现了其作为电磁致动器的效用。

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