In situ electrical property characterization of individual nanostructures using a sliding probe inside a transmission electron microscope

摘要

A sliding probe technique has been developed for the in situ electrical property characterization of individual nanostructures inside a transmission electron microscope (TEM) using a nanomanipulator. Experimental investigation into the transport measurement of copper-filled carbon nanotubes, carbide nanowires, and carbon microfiber has shown the effectiveness of this method. Comparing with conventional 4-point methods, the proposed setup is simple and agile and it can be readily combined with TEM-based imaging and analysis. Comparing with conventional 2-point methods, the sliding probe method are characterized by (1) the contact resistance can be partially eliminated and (2) sectional measurement using this method is particularly adaptable to non-uniform structures or hetero-structures.