Multibeam electron gun with arc-plasma deposing dispenser (impregnated) cathode

机译：具有弧等离子体的多芯电子枪减少分配器（浸渍）阴极

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This paper deals with 19-beam electron gun was calculated and projected with using single dispenser (impregnated) cathode with porous matrix which are build with the aid of arc-plasma depositing of tungsten powder on molybdenum wafer.

机译：使用单一分配器（浸渍的）阴极与多孔基质的借助于钼粉末沉积钼粉末的弧菌沉积，计算并投影并投影并投影了与19梁电子枪进行计算并投影。

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《International Conference on Actual Problems of Electron Devices Engineering》|2008年||共5页
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Akimov P.I.; Boikova T.S.; Nikitin A.P.; Smirnov V.A.;
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中图分类 TN6-532;
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专利

1. Cathode ray tube type electron gun as a source for multibeam electron lithography [J] . A. J. van den Brom, A. H. V. van Veen, W. M. Weeda, Journal of Vacuum Science & Technology. B, Microelectronics and Nanometer Structures . 2007,第6期

机译：阴极射线管型电子枪作为多束电子光刻的来源
2. Theoretical Research on a Multibeam-Modulated Electron Gun Based on Carbon Nanotube Cold Cathodes [J] . Xuesong Yuan, Bin Wang, Matthew T. Cole, IEEE Transactions on Electron Devices . 2016,第7期

机译：基于碳纳米管冷阴极的多束调制电子枪的理论研究
3. Emissivity of a multibeam electron gun with a glassy carbon field-emission cathode [J] . Bushuev N. A., Glukhova O. E., Grigorev Yu. A., Technical physics . 2016,第2期

机译：带有玻碳场发射阴极的多束电子枪的发射率
4. Multibeam electron gun with arc-plasma deposing dispenser (impregnated) cathode [C] . Akimov P.I., Boikova T.S., Nikitin A.P., International Conference on Actual Problems of Electron Devices Engineering . 2008

机译：具有弧等离子体的多芯电子枪减少分配器（浸渍）阴极
5. THE ELECTRONIC AND STERIC PROPERTIES OF IMPREGNATED THERMIONIC CATHODES: TOWARD THE DEVELOPMENT OF A SCIENTIFIC BASIS FOR "AB INITIO" CATHODE ARCHITECTURE. [D] . DANISZEWSKI, EDWARD JOHN. 1986

机译：浸渍热阴极的电子和位阻性质：朝着“从头开始”的阴极体系结构的科学基础的发展。
6. Large-Area Fluorescence and Electron Microscopic Correlative Imaging With Multibeam Scanning Electron Microscopy [O] . Shinsuke Shibata, Taro Iseda, Takayuki Mitsuhashi, 2019

机译：多光束扫描电子显微镜的大面积荧光和电子显微镜相关成像
7. Theoretical Research on a Multibeam-Modulated Electron Gun Based on Carbon Nanotube Cold Cathodes [O] . Yuan Xuesong, Wang Bin, Cole Matthew Thomas, 2016

机译：基于碳纳米管冷阴极的多束调制电子枪的理论研究

Multibeam electron gun with arc-plasma deposing dispenser (impregnated) cathode

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