Design of a CMOS-MEMS Diffraction Grating for Near-Infrared Spectroscopy of Biomolecules

摘要

This paper discusses the design of a CMOS-MEMS diffraction grating for a micro spectrophotometer with application in non-invasive glucose monitoring based on differential near-infrared spectro photometry. There are typically two factors discussed with respect to diffraction gratings: spectral range and optical resolution. An analysis of the tradeoff between these two parameters was performed for the determination of the geometric characteristics of our grating based on the limitations of the CMOS process.