Research on dynamic characteristic of the compliant lever mechanism driven by PZT

摘要

Piezoelectric actuator can cause severe non-linearity deformation under higher electrical field, the position accuracy of it will be damaged. The nonlinearity of piezoelectric actuator is related not only to nonlinearity of material, creep and hysteresis, but also to the dynamic performance of actuator. The hysteresis and nonlinearity of dynamic performance is a key factor for piezoelectric actuator to affect improvement of controlling accuracy. With the compound control algorithm of feed-forward and digital PID control, the closed-loop system is established to adjust dynamic response of the compliant lever mechanism of single degree of freedom. It is indicated by experiment that the time of dynamic response declines from 90ms to 50ms, the rapid response of mechanism is realized.