Low loss chalcogenide glass waveguides fabricated by thermal nanoimprint lithography

摘要

Low loss thermally nanoimprinted chalcogenide waveguides are demonstrated for the first time, uniquely using a soft PDMS stamp. Losses of 0.24 dB/cm at 1550 nm limited by Rayleigh scattering were achieved and embossing of As₂S₃ also demonstrated.