Research Status and Development of Magnetically Suspended Rotor Gyroscopes

摘要

The suspended rotor gyroscope has a potential advantage of high precision, in addition, it can survey 2 axes of angular rate and 3 axes of acceleration simultaneously. Two kinds of gyroscopes exist, which are electrostatically suspended rotor gyroscopes and magnetically suspended rotor gyroscopes. In this paper, the respective characteristics of various structures, operating principles, fabrication processes and performances of magnetically suspended rotor gyroscope developed in the world are summarized, especially the Magnetically suspended MEMS gyroscopes, are described in detail.