MEMS-Based Tunable Filters for Compact IR Spectral Imaging

摘要

Arrays of independently tunable MEMS Fabry-Perot filters have been developed that enable spectral tuning over the range of 11 - 8 microns with a filter bandwidth of ～ 120 nm. Actuation is provided using a MEMS driver IC that is hybridized to the MEMS chip. Combining the filter array with an IR FPA enables spatially-resolved spectral tuning in a compact architecture. Tunable spectral response data from the first integrated tunable filter / FPA device are presented.