A new five degree-of-freedom measurement method and system

摘要

In this paper, a newly developed system for simultaneously measuring five-degree-of-freedom errors of machine tools is introduced. A single-mode fiber-coupled laser module is used to eliminate the beam drift of the laser source. Only a cube corner retro-reflector and a beam splitter are adopted in the moving target in order to sense the straightness errors and angle errors (pitch and yaw) respectively and simultaneously. A special prism (including a beam-splitter facet and an all-reflecting facet) was adopted to measure the roll. A simple common-path compensation method for laser beam drift is put forward, and a 2D position-sensitive detector and a lens are used to monitor angular drift of the laser beam. It is convenient to measure the parameters of the numerical control machine in workshop due to non-cable connecting between moving target and measurement head. The error analysis and theory analysis of roll which provide potent theoretical guidance in the future are given in detail.