Formation of ion-ion plasmas and ion beams in continuously rf generated plasmas

摘要

The ion-ion plasma formation in a continuously driven rf generated plasma is studied. The experimental investigation confirms that an ion-ion plasma can be efficiently produced by tailoring both the electron temperature and the electronegative gas injections in such a way that neutral gas is efficiently present in both the low and high electron temperature region. Furthermore, we show that by biasing the plasma core up to large positive values allows an increased ion flux perpendicular to the magnetic fields.