Design of weighting filters with dynamic uncertainty for ultra precision positioning stage

摘要

In this paper, weighting filters are designed to characterize the performance demands and uncertainty specifications of an ultra precision positioning stage in IC manufacturing. To deal with dynamical uncertainty, the motion principles and structural properties of ultra-precision stage are discussed, and then dynamical parameters of the positioning stage are identified. A feedback controller is synthesis by using the weighting filters in H¿ mathematical framework. Simulation results are presented to show the applicability of the proposed weighting filters.