Influence of different piezoelectric materials and thicknesses on the performance of stacked crystal film bulk acoustic wave filters

摘要

Stacked crystal film bulk acoustic wave filters (SCFBAF) have obvious advantages over other filters (such as ladder-type filters, coupled resonator filters, etc.), including low insertion loss, small size and high stop-band attenuation, working in super high operating frequencies, etc. This paper presents the design and simulation of a six layers of SCFBAF. Structure of SCFBAF is illustrated and properties of three kinds of piezoelectric materials (lead zirconate titanate, zinc oxide and aluminum nitride) are compared. Amplitude-frequency curves of SCFBAF with different piezoelectric materials and thicknesses are obtained by using ANSYS 11.0. Based on the simulation results, analyses of performances of SCFBAF are stated. Finally relationships among performance, thickness and materials are concluded. The research results are valuable for design, fabrication and measurement of next generation complex RF MEMS filters.