Vertical In0.53Ga0.47As tunnel field effect transistors (TFETs) with 100nm channel length and high-k/metal gate stack are demonstrated with high Ion/Ioff ratio (>104). At VDS = 0.75V, a record on-current of 20ÃÂÿA/ÃÂÿm is achieved due to higher tunneling rate in narrow tunnel gap In0.53Ga0.47As. The TFETs exhibit gate bias dependent NDR characteristics at room temperature under forward bias confirming band to band tunneling. The measured data are in excellent agreement with two-dimensional numerical simulation at all drain biases. A novel 6T TFET SRAM cell using virtual ground assist is demonstrated despite the asymmetric source/drain configuration of TFETs.
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机译:展示了具有100nm沟道长度和高k /金属栅叠层的垂直In 0.53 sub> Ga 0.47 sub> As隧道场效应晶体管(TFET),具有高I 导通 sub> / I off sub>比率(> 10 4 sup>)。在V DS sub> = 0.75V时,由于在较窄的隧道间隙中具有较高的隧穿速率,因此实现了20μA/μA的记录电流。在 0.53 sub> Ga 0.47 sub> As中。在室温下,TFET在正向偏置下证实了带间隧道效应,并具有与栅极偏置相关的NDR特性。在所有漏极偏置下,测量数据与二维数值模拟都非常吻合。尽管TFET的源/漏配置不对称,但使用虚拟接地辅助的新型6T TFET SRAM单元仍得到了演示。
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