Research on Dynamic Characteristic of Typical Component of Ultra Precision Gas-bearing Stage

摘要

This paper presents a dynamic analysis of ultra precision gas bearing linear motion system through a simplified dashpot-dashpot support beam subjected to force and toque excitation.H type ultra precision position gas bearing linear motion stage with 2DOF is one type of extensive used ultra precision position stage,its X glide way is supported by two gas bearing at two end and it support a payload stage through linear motor.Due to the center of gravity and the center of drive force can’t be on line precisely,X glide and payload stage will vibrate when acceleration or deceleration,this will do harm to the control system.In order to solve this problem,the glide way is be simplified as a spring-spring supported beam,pitch of payload is simplified as force and torque.This type of beam can be assumed to be rigid beam or flexible beam.Analysis of the beam including a rigid beam vibration and a flexible Euler-Bernoulli beam vibration,then solution of the rigid beam is given by classical theory.Moreover,dynamic analysis of a flexible beam is proceeded on the basis of mechanics of elasticity and the solution is given with concentrated damping and distributed damping condition.At last,some numerical results are presented.