SOLID-STATE SENSOR BEHAVIOR IN REDUCED-PRESSURE ENVIRONMENTS DEMONSTRATION USING AN EXPERIMENTAL INDIUM TIN OXIDE OZONE GAS SENSOR FOR OZONE SOUNDING

摘要

Sensors in reduced pressure environments exhibit largely uncharacterized behaviors. Several solid-state sensors, such as the CMOS indium tin oxide (In_2O_3:SnO_2) sensor, offer key benefits in response rates and sensitivity when compared to temperature and pressure dependent sensor technologies. The indium tin oxide (ITO) thin film sensor for the measurement of ozone, developed by the University of North Florida, represents a unique, easily produced in mass, and newly designed solid-state nanocrystalline gas sensor array (patent pending). These sensors allow detection to the parts per billion by volume (ppbv) level. Testing for ozone quantitatively agreed with calibration to within 15% and involved testing aboard a NASA high altitude balloon. This research addresses many serious unmet needs for miniature sensors capable of in-situ and real-time detection of ozone gas in reduced pressure and low temperature. Because these ITO sensors, developed at UNF, do not require the high operating temperatures of previous sensors and because these sensors maintain good stability under harsh atmospheric conditions, gas sensors of this type appear as good candidates for use in extraterrestrial applications, and in space flight instrumentation. These sensor archetypes should help satisfy the rigorous demands of space flight technologies and the future demands of the VSE.