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LASER THERMAL PROCESSING OF NANOWIRES

机译:纳米线的激光热加工

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摘要

Semiconductor nanowires offer an alternative bottom-up route for nanoscale electronics and photonics application. The possibility of combining nanowires with cheap flexible substrates in the form of nanowire thin-films or composite materials composed of nanowires has opened up a new paradigm for inorganic semiconductor based technologies on flexible substrates. Recently, thin film transistors have been fabricated on plastic substrates based on this technique. This paper discusses laser thermal processing of nanowires as an alternative to conventional thermal processing. Ultra-short pulsed lasers allow for localized energy deposition into nanowires and can therefore enable thermal processing of nanowires on sensitive substrates such as plastics. Laser-based annealing of ion-implanted silicon nanowires is investigated for application in high performance flexible electronics. The efficacy of laser processing is examined through studies of the effect of number of pulses and incident fluence levels on conductance of the nanowires. Finally, numerical predictions of the absorption in the nanowires are presented.
机译:半导体纳米线为纳米级电子和光子学应用提供了另一种自下而上的途径。将纳米线与廉价的柔性基板(以纳米线薄膜或由纳米线组成的复合材料形式)组合的可能性为柔性基板上的基于无机半导体的技术开辟了新的范例。近来,已经基于该技术在塑料基板上制造了薄膜晶体管。本文讨论了纳米线的激光热处理,以作为常规热处理的替代方法。超短脉冲激光器允许将局部能量沉积到纳米线中,因此可以在敏感的基材(例如塑料)上对纳米线进行热处理。研究了离子注入的硅纳米线的基于激光的退火技术在高性能柔性电子学中的应用。通过研究脉冲数和入射注量水平对纳米线电导的影响,研究了激光加工的功效。最后,给出了纳米线中吸收的数值预测。

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