AN EXPERIMENT TO DETERMINE THE ACCURACY OF SQUEEZE-FILM DAMPING MODELS IN THE FREE-MOLECULE REGIME

摘要

Current published models for predicting squeeze film damping (SFD), which are based on different assumptions, give widely different results in the free-molecule regime. The work presented here provides experimental data for validating SFD models in that regime. The test device was an almost rectangular micro plate supported by beam springs. The structure was base-excited. The rigid plate oscillated vertically while staying parallel to the substrate. The velocities of the plate and of the substrate were measured with a laser Doppler vibrometer and a microscope. The damping ratio was calculated by performing modal analysis of the frequency response functions. The test structures were contained in a vacuum chamber with air pressures controlled to provide a five-order-of-magnitude range of Knudsen numbers. The damping coefficients from the measurements were compared with predictions from various published models. The results show that the continuum-base Reynolds equation predicts squeeze-film damping accurately if used with correct boundary conditions. The accuracy of molecular-based models depends heavily on the assumptions used in developing the models.