The Effect of Orientation on the Properties of Transparent Conducting SnO2 :F Films

摘要

Highly transparent and low-resistance SnO2:F films have been deposited by an ultrasonic spray pyrolysis process. SnCl4·5H2O and NH4F were used as tin source compound and for F doping, respectively. The temperature of substrates was about 360°C. An X-ray diffraction (XRD) unit was used for recording the XRD patterns. Surface morphology, optical transmittance and sheet resistance were examined and characterized. The XRD results snow that the primary crystal structures of thin films are polycrystalline SnO2 tetragonal phase. The SnO2: F films, which deposited under different conditions , have different preferred orientation among (110), (200). The films with strong (200) orientations have the lowest sheet resistance at 5 Ω/□. All films are highly transparent and uniform.