The microscopic characteristics of a functional fluid for a micro polishing process were investigated by microscopic observation and micro particle image velocimetry. This functional fluid, which consists of suspended micro scale diamond particles in insulated silicon oil, has two specific flow structures under a high-voltage alternating electric field. One flow structure consists of a reciprocating flow generated in one direction between the electrodes under low-electric-field and high-frequency conditions. The other flow structure consists of a rotational flow formed under high-electric-field and low-frequency conditions. These specific flow structures contribute actively to a polishing process and to the development of micro fluidic devices in the future. In the present study, the effect of the electric field on specific flow structures and the mechanism of the induced flow are clarified.
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