Debris characteristics of a laser-produced plasma extreme ultraviolet emission source using a colloidal tin dioxide nano-particle jet target

摘要

Characteristics of emitted particles from a laser-produced tin plasma using a colloidal tin dioxide nano-particle jet target were investigated. By using double laser pulses, the EUV conversion efficiency at 13.5 nm and the ion energy were simultaneously regulated. Deposited amount of tin oxide was not well controlled, however.